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| 1 |
8,440,941 |
Heat treatment apparatus, heat treatment method and method for
manufacturing semiconductor device
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| 2 |
8,426,778 |
Tunable-illumination reflector optics for UV cure system
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| 3 |
8,357,878 |
UV LED based lamp for compact UV curing lamp assemblies
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| 4 |
8,346,068 |
Substrate rotating and oscillating apparatus for rapid thermal process
|
| 5 |
8,330,080 |
Electric oven with adjustable heating element
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| 6 |
8,314,368 |
Silver reflectors for semiconductor processing chambers
|
| 7 |
8,294,068 |
Rapid thermal processing lamphead with improved cooling
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| 8 |
8,256,410 |
Barbecue grill
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| 9 |
8,256,409 |
Heating cooker
|
| 10 |
8,229,291 |
Radiator apparatus
|
| 11 |
8,227,729 |
Rapid conductive cooling using a secondary process plane
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| 12 |
8,222,570 |
System and process for heating semiconductor wafers by optimizing
absorption of electromagnetic energy
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| 13 |
8,217,313 |
Heating apparatus and heating method
|
| 14 |
8,203,101 |
Conveying device
|
| 15 |
8,183,502 |
Mounting table structure and heat treatment apparatus
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| 16 |
8,158,911 |
Heating apparatus, substrate processing apparatus employing the same,
method of manufacturing semiconductor devices, and extending member
|
| 17 |
8,145,046 |
Heat treatment apparatus and method for heating substrate by light
irradiation
|
| 18 |
8,138,451 |
Heating device for heating semiconductor wafers in thermal processing
chambers
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| 19 |
8,129,663 |
Vacuum heating apparatus
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| 20 |
8,115,141 |
Heating element
|
| 21 |
8,110,780 |
Photoirradiation type heat treatment apparatus
|
| 22 |
8,076,615 |
Substrate processing apparatus and method of manufacturing semiconductor
device
|
| 23 |
8,047,251 |
Reduction of powder waste in selective inhibition of sintering
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| 24 |
8,041,198 |
Heat treatment apparatus and method for heating substrate by
photo-irradiation
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| 25 |
8,035,062 |
Combination speed cooking oven
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| 26 |
8,017,889 |
Radiant convection baffle for ovens
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| 27 |
8,014,895 |
Temperature setting method of heat processing plate, temperature setting
apparatus of heat processing plate, program, and computer-readable
recording medium recording program thereon
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| 28 |
7,985,945 |
Method for reducing stray light in a rapid thermal processing chamber by
polarization
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| 29 |
7,978,963 |
Thermal processing apparatus
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| 30 |
7,973,266 |
Heat treatment apparatus which emits flash of light
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| 31 |
7,972,441 |
Thermal oxidation of silicon using ozone
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| 32 |
7,952,054 |
Heating element
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| 33 |
7,847,218 |
System and process for heating semiconductor wafers by optimizing
absorption of electromagnetic energy
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| 34 |
7,831,135 |
Method and system for controlling bake plate temperature in a
semiconductor processing chamber
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| 35 |
7,812,286 |
Rapid conductive cooling using a secondary process plane
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| 36 |
7,805,065 |
Radiator apparatus
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| 37 |
7,778,533 |
Semiconductor thermal process control
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| 38 |
7,772,527 |
Heat reflector and substrate processing apparatus comprising the same
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| 39 |
7,764,872 |
Cooling device, and apparatus and method for manufacturing image display
panel using cooling device
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| 40 |
7,745,762 |
Optimizing the thermal budget during a pulsed heating process
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| 41 |
7,737,385 |
Selective reflectivity process chamber with customized wavelength response
and method
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| 42 |
7,732,739 |
Substrate heat treatment apparatus and substrate transfer tray used in
substrate heat treatment
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| 43 |
7,723,649 |
Vacuum thermal annealer
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| 44 |
7,692,120 |
Transport robot and transport apparatus
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| 45 |
7,683,292 |
Method for cooking a food with infrared radiant heat
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| 46 |
7,683,291 |
Substrate processing method and manufacturing method of semiconductor
device
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| 47 |
7,671,301 |
Cooking appliance cowling apparatus and method
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| 48 |
7,643,736 |
Apparatus and method for manufacturing semiconductor devices
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| 49 |
7,616,872 |
Temperature measurement and heat-treating methods and systems
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| 50 |
7,608,802 |
Heating device for heating semiconductor wafers in thermal processing
chambers
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