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| 1 |
8,467,668 |
Infrared room heater system
|
| 2 |
8,457,479 |
Rapid thermal processing apparatus and method of manufacture of
semiconductor device
|
| 3 |
8,455,293 |
Method for processing solar cell substrates
|
| 4 |
8,452,166 |
Apparatus and method for measuring radiation energy during thermal
processing
|
| 5 |
8,450,658 |
Semiconductor processing apparatus
|
| 6 |
8,450,652 |
Apparatus for thermally treating semiconductor substrates
|
| 7 |
8,440,941 |
Heat treatment apparatus, heat treatment method and method for
manufacturing semiconductor device
|
| 8 |
8,428,448 |
Walking beam type heat treatment apparatus
|
| 9 |
8,426,323 |
Substrate processing apparatus, substrate annealing method, and
semiconductor device manufacturing method
|
| 10 |
8,367,983 |
Apparatus including heating source reflective filter for pyrometry
|
| 11 |
8,367,976 |
Laser heating of aqueous samples on a micro-optical-electro-mechanical
system
|
| 12 |
8,367,975 |
Temperature adjustment method
|
| 13 |
8,357,878 |
UV LED based lamp for compact UV curing lamp assemblies
|
| 14 |
8,355,624 |
Susceptor for heat treatment and heat treatment apparatus
|
| 15 |
8,346,068 |
Substrate rotating and oscillating apparatus for rapid thermal process
|
| 16 |
8,315,510 |
Light emitting type heat treatment apparatus
|
| 17 |
8,314,368 |
Silver reflectors for semiconductor processing chambers
|
| 18 |
8,309,421 |
Dual-bulb lamphead control methodology
|
| 19 |
8,298,372 |
Quartz window having gas feed and processing equipment incorporating same
|
| 20 |
8,295,691 |
Heat treatment apparatus
|
| 21 |
8,294,068 |
Rapid thermal processing lamphead with improved cooling
|
| 22 |
8,283,607 |
Apparatus including heating source reflective filter for pyrometry
|
| 23 |
8,254,767 |
Method and apparatus for extended temperature pyrometry
|
| 24 |
8,253,075 |
Heat treatment apparatus, heater, and method for manufacturing the heater
|
| 25 |
8,249,436 |
System for non radial temperature control for rotating substrates
|
| 26 |
8,238,732 |
Oven with light emitting diode and/or laser diode as heating devices
|
| 27 |
8,238,731 |
Light-emitting heat treatment apparatus
|
| 28 |
8,233,784 |
Radiant heater
|
| 29 |
8,227,728 |
Radiant tube broiler
|
| 30 |
8,222,570 |
System and process for heating semiconductor wafers by optimizing
absorption of electromagnetic energy
|
| 31 |
8,217,313 |
Heating apparatus and heating method
|
| 32 |
8,158,911 |
Heating apparatus, substrate processing apparatus employing the same,
method of manufacturing semiconductor devices, and extending member
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| 33 |
8,150,243 |
Heating process apparatus
|
| 34 |
8,150,242 |
Use of infrared camera for real-time temperature monitoring and control
|
| 35 |
8,147,137 |
Pyrometry for substrate processing
|
| 36 |
8,138,451 |
Heating device for heating semiconductor wafers in thermal processing
chambers
|
| 37 |
8,126,319 |
Radiant oven with stored energy devices and radiant lamps
|
| 38 |
8,116,618 |
Heating apparatus, substrate processing apparatus, and method of
manufacturing semiconductor devices
|
| 39 |
8,115,142 |
Plate, apparatus for adjusting temperature of substrate having the plate
and apparatus for processing substrate having the plate
|
| 40 |
8,114,786 |
Heat treatment method, heat treatment apparatus and substrate processing
apparatus
|
| 41 |
8,111,978 |
Rapid thermal processing chamber with shower head
|
| 42 |
8,110,780 |
Photoirradiation type heat treatment apparatus
|
| 43 |
8,107,800 |
Method and structure to control thermal gradients in semiconductor wafers
during rapid thermal processing
|
| 44 |
8,090,245 |
Apparatus for heat-treating substrate and method for heat-treating
substrate
|
| 45 |
8,076,615 |
Substrate processing apparatus and method of manufacturing semiconductor
device
|
| 46 |
8,073,316 |
Oven for semiconductor wafer
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| 47 |
8,073,315 |
Radiant heater for heating the building material in a laser sintering
device
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| 48 |
8,062,471 |
Proximity head heating method and apparatus
|
| 49 |
8,059,946 |
Concentrated thermal radiation transfer system from electrically produced
source
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| 50 |
8,041,196 |
Heat radiating plate storage tray
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