|
|
|
| 1 |
8,142,260 |
Methods and apparatus for removal of films and flakes from the edge of
both sides of a substrate using backing pads
|
| 2 |
7,824,244 |
Methods and apparatus for polishing a semiconductor wafer
|
| 3 |
7,367,873 |
Substrate processing apparatus
|
| 4 |
7,229,343 |
Orbiting indexable belt polishing station for chemical mechanical
polishing
|
| 5 |
6,997,789 |
Method and apparatus for planarizing a microelectronic substrate with a
tilted planarizing surface
|
| 6 |
6,918,816 |
Apparatus and method for polishing a fiber optic connector
|
| 7 |
6,918,814 |
Polishing apparatus
|
| 8 |
6,916,230 |
Abrasive belt and machining process associated therewith
|
| 9 |
6,902,466 |
Oscillating chemical mechanical planarization apparatus
|
| 10 |
6,875,085 |
Polishing system including a hydrostatic fluid bearing support
|
| 11 |
6,793,565 |
Orbiting indexable belt polishing station for chemical mechanical polishing
|
| 12 |
6,783,440 |
Polishing apparatus
|
| 13 |
6,749,489 |
Method and apparatus for planarizing and cleaning microelectronic
substrates
|
| 14 |
6,726,544 |
Method and apparatus for superfinishing tapered roller bearing
|
| 15 |
6,722,957 |
Method and apparatus for planarizing a microelectronic substrate with a
tilted planarizing surface
|
| 16 |
6,682,396 |
Apparatus and method for linear polishing
|
| 17 |
6,679,755 |
Chemical mechanical planarization system
|
| 18 |
6,626,744 |
Planarization system with multiple polishing pads
|
| 19 |
6,620,033 |
Thrustwall polishing assembly
|
| 20 |
6,612,914 |
Platen with lateral web tensioner
|
| 21 |
6,609,958 |
Apparatus and method for edging a contact lens
|
| 22 |
6,607,425 |
Pressurized membrane platen design for improving performance in CMP
applications
|
| 23 |
6,572,459 |
Machine for machining in particular superfinishing, cylindrical surfaces of
circular cylindrical workpieces, using an abrasive belt moving
tangentially
|
| 24 |
6,520,833 |
Oscillating fixed abrasive CMP system and methods for implementing the same
|
| 25 |
6,413,146 |
Polishing apparatus
|
| 26 |
6,394,883 |
Method and apparatus for planarizing and cleaning microelectronic
substrates
|
| 27 |
6,368,193 |
Method and apparatus for planarizing and cleaning microelectronic
substrates
|
| 28 |
6,332,826 |
Polishing apparatus
|
| 29 |
6,319,103 |
Chemical mechanical polishing apparatus
|
| 30 |
6,283,838 |
Burnishing tape handling apparatus and method
|
| 31 |
6,277,005 |
Apparatus for the application of an advanced texture process
|
| 32 |
6,248,003 |
Method of truing grinding wheel and device used in performing such method
|
| 33 |
6,193,588 |
Method and apparatus for planarizing and cleaning microelectronic
substrates
|
| 34 |
6,155,914 |
Apparatus for the application of an advanced texture process
|
| 35 |
6,139,402 |
Method and apparatus for mechanical and chemical-mechanical
planarization of microelectronic substrates
|
| 36 |
6,129,612 |
Advanced mechanical texture process for high density magnetic recording
media
|
| 37 |
6,102,783 |
Apparatus for microfinishing cam-shaft surfaces
|
| 38 |
6,095,904 |
Orbital motion chemical-mechanical polishing method and apparatus
|
| 39 |
6,048,257 |
Abrasive pad holder
|
| 40 |
6,039,633 |
Method and apparatus for mechanical and chemical-mechanical
planarization of microelectronic-device substrate assemblies
|
| 41 |
5,980,368 |
Polishing tool having a sealed fluid chamber for support of polishing pad
|
| 42 |
5,961,379 |
Tool grinding machine
|
| 43 |
5,938,504 |
Substrate polishing apparatus
|
| 44 |
5,928,066 |
Apparatus for polishing peripheral portion of wafer
|
| 45 |
5,865,669 |
Abrasive machining apparatus equipped with a device for facilitating
replacement of abrasive tape
|
| 46 |
5,803,796 |
Microfinishing machine
|
| 47 |
5,766,065 |
Apparatus for polishing peripheral portion of wafer
|
| 48 |
5,730,647 |
Apparatus for fine-grinding a crankshaft
|
| 49 |
5,722,878 |
Method and apparatus for microfinishing
|
| 50 |
5,692,947 |
Linear polisher and method for semiconductor wafer planarization
|
